Cleanliness is one of the most important parameters in semiconductor manufacturing process. With the decrease of semiconductor gate width, the requirements for pollution control are higher and higher. A tiny pollution may lead to the failure and scrapping of a chip, so controlling pollutants is one of the most critical steps in semiconductor manufacturing process.

　　总的来说，半导体制程中的污染物分类大致如下：

According to the report of Asian economy on March 24, the Ministry of industry, trade and resources of South Korea quoted his technical data of the United States as saying that last year, the semiconductor production volume of South Korean enterprises reached US $51.516 billion, accounting for 16.2% of the global market share, replacing Japan (US $43.432 billion, 13.7%) as the second in the world. This is because South Korea has surpassed Japan in this field since it began producing semiconducto

Production line automation is an important way to realize this development trend. China International Electronics and equipment and microelectronics industry exhibition focuses on providing a commercial procurement platform for electronic manufacturers and equipment suppliers with automation solutions.

Chinese experts said that the development of China's semiconductor industry in the future will be the same as the rapid development of the electronic industry in the past. The number of chips and technical bottlenecks will be controlled by others. For a long time, China will become a world power. The rise of semiconductor industry is the road to power.

The manufacturing process of integrated circuits requires a large number of manufacturing and processing equipment. These equipment have high technical content, great manufacturing difficulty and high equipment value. According to the upstream and downstream division of the semiconductor industry chain, semiconductor devices belong to the semiconductor industry. The use of semiconductor devices goes through the upstream, midstream and downstream of the semiconductor manufacturing process. On the

Intelligent factory can be divided into three levels. The first level is the equipment level solution based on automation and control. The imported applications are CNC equipment, PLC, I / O, touch panel and motion control products; The second layer is the man-machine interface and monitoring system. The imported applications include HMI / SCADA, integrated monitoring of factory equipment, collection of real-time and historical data, integrated analysis of efficiency and energy-saving control; T